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NI PXI Microelectromechanical (MEMS) Test System

Characterize MEMS Accelerometers, Gyroscopes, Microphones

  • ±20 V, 2 A source/measure capability for parametric measurements down to 1 nA sensitivity
  • Two simultaneously updated analog inputs and outputs with 24-bit resolution up to 204.8 kS/s
  • Up to 200 MHz digital I/O with various voltage levels for MEMS output/input signals
  • Characterize open/shorts, standby/leakage current (IDD), positive/negative continuity, and more
  • Switch in DC instrumentation to multiple test points
  • Control MEMS operation through common digital protocols including SPI, I2C, and JTAG

National Instruments offers a variety of products for designing semiconductor test systems used in validation, characterization, and production environments. The PXI platform provides a compact, zero-footprint test system that comprises modular instruments with advanced timing and synchronization technologies for measurements from DC to 6.6 GHz.

The NI PXI Microelectromechanical (MEMS) Test System includes the key instruments you need to fully characterize MEMS accelerometers, gyroscopes, and microphones. The system incorporates a source measure unit (SMU) for common DC parametric measurements (open/shorts, leakage testing), a high-accuracy data acquisition module for precision sound and vibration measurements over large dynamic ranges, high-speed digital I/O to interface to the MEMS device via common communication protocols (SPI, I2C, JTAG), and a switch module to route DC instrumentation to multiple test points.

The PXI MEMS Test System solution features the instruments you need to take common measurements on MEMS devices including open/shorts, standby current, reference IDD, positive and negative continuity testing, leakage current, input and output logic thresholds, and dynamic measurements. Combined with NI LabVIEW software, this solution helps you quickly customize your system to take the specific measurements you need to characterize your MEMS device. Get up and running fast with example programs written by NI systems engineers for common measurements critical to characterizing your design.

NI PXI Microelectromechanical (MEMS) Test System
Bundle Contents

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Digital Instrumentation
Select products for generating test patterns to a DAC, for standard/custom digital protocols (SPI, I2C, JTAG, etc)

100 MHz, Stimulus/Response, Bidirectional (PXI-6552) 778539-02
Programmable voltage levels from -2 to 5V for VOH, VOL, VIH, VIL (per board)
100 MHz, Selectable Voltage, High-Channel Count (PXI-6542) 778953-02
Select from 1.8, 2.5, and 3.3V logic levels

DC Parametric Measurements
Select products for open/shorts, leakage, power consumption, and other DC measurements

Source Measure Unit (PXI-4130) 779647-31
Four quadrant source/measure capability, down to 1 nA sensitivity
Three channel output: +20V, -20V, +6V, down to uA sensitivity 779647-11
Three channel output: +20V, -20V, +6V, down to uA sensitivity

Dynamic Signal Acquisition
Select products for stimulus / response to microphones and other MEMS devices

MEMS Microphone/Accelerometer Stimulus and Response (PXI-4461) 778442-01
Dual channel input/output instrument with up to 24-bit resolution and 118 dB dynamic range

Software
Select a software package to develop your application or manage your test suite

TestStand Dev. System, Windows, Include 1 Year SSP 777777-35
Automate the characterization of your IC when taking multiple measurements and manage instrument resources to optimize test times. Develop, manage, and execute test sequences written in any programming language with custom reporting to summarize your test results.
LabVIEW Professional Development System, Windows, Include 1 Year SSP 776678-35
Develop intuitive user interfaces for your characterization test station, and create custom test applications with graphical programming. Extract useful information from your data with interactive wizards and more than 500 built-in LabVIEW measurement analysis and signal processing functions.

Chassis

8-Slot 3U PXI Express Chassis (PXIe-1062Q) 779633-01
4 PXI slots, 2 PXI Express hybrid slots, and 1 PXI Express system timing slot

Controller

PXI Express Embedded Controller (Windows XP) 779920-01
2.16 GHz Intel Core 2 Duo T7400 dual-core processor with up to 1 GB/s system bandwidth
PXI Express Embedded Controller (Windows Vista) 779920-02
2.16 GHz Intel Core 2 Duo T7400 dual-core processor with up to 1 GB/s system bandwidth

AC Power Cord

Power Cord, AC, U.S., 120 VAC 763000-01
Power Cord, 240V, 10A, North American 763068-01

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Specifications Documents