Customer SolutionsUsing LabVIEW to Create Gas Sensor Characterization System
Author(s):Chan Chui Chai, Nanyang Technological University
Industry:Semiconductor
Product:Data Acquisition, GPIB & Instrument Control, LabVIEW
The Challenge:Characterizing thick and thin film gas sensors that are fabricated using hybrid technology with an automated system.
The Solution:Building a PC-based system using GPIB and data acquisition (DAQ) boards controlled by LabVIEW.Introduction The system is PC-based. The computer monitors and controls all system equipment. The AT-GPIB/TNT (PnP) interface board communicates with the measuring instruments, namely the HP 4192 impedance analyser, HP 4282 precision LCR meter, and source measure unit. The second and third serial ports, provided by a plug-in serial I/O board, communicate between the MKS Type 232 Interface and the TMS 93 temperature controller, respectively. The Lab-PC-1200AI DAQ board acquires temperature readings at the test chamber via the temperature board. The control instrument - MKS Type 232 interface - serves as the communicating platform between the system controller and the MKS Type 247C 4-channel readout. The 4-channel readout provides a remote (via PC) or manual mode to control and acquire the gas flow rate of the mass flow controllers (MFCs) for each channel. The various gases from the MFCs are premixed in a chamber to ensure homogeneity of the test gas during measurement. A separate control instrument - TMS 93 temperature controller - adjusts the temperature in the test chamber. Similar to the 4-channel readout, the temperature controller provides modes to control the temperature remotely and manually. The temperature board measures low-level thermocouple signals. Together with the DAQ board, the temperature board acquires the signals without an external conditioning board. The vacuum pump is used to discharge the gases out of the test chamber. Four of the five modules - LCR time sampling, LCR DC bias sweeping, LCR frequency sweeping, and HP 4192 - measure AC characteristics of the gas sensor based on time, DC bias, and frequency. In addition, DC characterizations of the gas sensor can be measured by the Keithley 236 module. Concerning the looping mechanism, acquisition is performed as many times as the user specifies. Entering a new loop, the software modules act as the controller, setting various parameters to these desired values. Next the modules switch to talker mode to acquire the necessary data. Eventually, the modules become listeners to record the data produced by the equipment. LabVIEW continuously triggers itself through the functional stages until the last condition isachieved or the module is terminated by pressing the <Stop> button. Features have been incorporated into the modules to enhance their user-friendliness. The features include the automated graph clearing mechanism and the tiling concept.The automated graph clearing mechanism reshapes the arrays that pass values into the graph to a zero dimension at the beginning of the experiment. Thus, the graph palette is no longer necessary. The tiling concept groups together controls and indicators to clean up the overcrowded front panel. The visibility of a few overlapping clusters is controlled by their attribute nodes. Only one cluster is shown at a time. Chan Chui Chai and Ooi Seong Thean Mr O. K.Tan and Dr W. Zhu School of Electrical & Electronic Engineering Nanyang Technological University Nanyang Avenue Singapore 639798 Tel: 065-790-5411 Fax: 065-791-2687 E-mail: eoktan@ntu.edu.sg View the entire user solution in Adobe Acrobat PDF format. |
